S530系列参数测试系统应用指南

S530系列参数测试系统应用指南
Number 3169


Application Note Making Ring Oscillator Measurements
Series with the Model S530 Parametric Test
System’s Frequency Measurement Option
Introduction
(a) Vdd
In the world of CMOS wafer parametric testing, the ring
oscillator is one of the more important test structures because its
test data helps confirm that logic gates are meeting their speed
design criteria. This application note discusses techniques for
testing these devices using Keithley’s Model S530 Parametric