Laser Direct Writing Digital Servo Controller Based on SOPC Technology

Laser Direct Writing Digital Servo Controller Based on SOPC Technology
Laser Direct Writing Digital Servo Controller Based on SOPC Technology




Second Prize


Laser Direct Writing Digital Servo
Controller Based on SOPC Technology

Institution: Ultra-Precision Photoelectric Instrument Engineering Research
Institute, Harbin Institute of Technology

Participants: Lei Yan, Tao Cheng, Ya Gao

Instructor: Wang Lei




Design Introduction
The application of precision/ultra-precision processing technology has expanded from a few areas (such
as national defense and aerospace) to different aspects of the national economy. As the semiconductor
industry develops, it imposes increasing requirements on laser direct writing lithography, which is the
core of very-large-scale integration (VLSI) ma