Introduction to MEMS

Introduction to MEMSCourse No. 04813190 MEMS DEVICES AND DESIGN , Spring 2004

Lecture1: Introduction to MEMS
Haixia Zhang Institute of Microelectronics, PKU

MEMS DEVICES AND DESIGN , Spring 2004, Lecture1, Haixia Zhang, PKU

Overview
What is MEMS and why MEMS? z The History of MEMS z MEMS Design Items z The future of MEMS z Summary z Homework1
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MEMS DEVICES AND DESIGN , Spring 2004, Lecture1, Haixia Zhang, PKU

MEMS DEVICES AND DESIGN , Spring 2004, Lecture1, Haixia Zhang, PKU

MEMS DEVICES AND DESIGN , Spring 2004, Lecture1, Haixia Zhang, PKU

MEMS Meaning

MEMS DEVICES AND DESIGN , Spring 2004, Lecture1, Haixia Zhang, PKU

General MEMS Design Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common substrate through the utili