解密压阻式压力传感器

几年已广泛使用的单晶硅压力传感器。尽管半导体技术制造的，他们也对电阻的原则运作。在单晶硅半导体（压电效应）的电阻变化是大大高于标准应变计，其电阻变化与几何结构的变化。在掺杂半导体的导电性变化（晶体网格压缩或拉伸），可以由一个非常小的机械变形产生影响。使用温度补偿和放大信号信号调理集成电路，分立电路，提供优越的性能。
Maxim > App Notes > AUTOMOTIVE SENSOR SIGNAL CONDITIONERS

Keywords: piezoresistive, pressure sensors, micromachine pressure sensors, pressure control systems, Dec 07, 2001
monocrystalline, silicon transducer, temperature, pizoresistive

APPLICATION NOTE 871
Demystifying Piezoresistive Pressure Sensors

Abstract: Monocrystalline silicon pressure sensors have come into wide use in recent years. Though
manufactured with semiconductor technology, they also operate on the resistive principle. The resistance
change in a monocrystalline semiconductor (a piezoelectric effect) is substantially higher than that in standard
strain gauges, whose resistance changes with geometrical changes in the structure. Conductivity in a doped
semiconductor is influenced by a change (compression or stretch