首页|嵌入式系统|显示技术|模拟IC/电源|元件与制造|其他IC/制程|消费类电子|无线/通信|汽车电子|工业控制|医疗电子|测试测量
首页 > 分享下载 > 元件与制造 > MEMS

MEMS

资料介绍
Mems white paper
MEMS: Mainstream Process Integration

Introduction: A Counter-Revolution in MEMS Technology
The picture below shows a prototype example of foundry-based, wafer scale, hermetic encapsulation for optical
MEMS arrays. The resulting wafer is fully compatible with conventional back-end processing. For the first time,
MEMS can leverage mainstream technologies for dicing, packaging and assembly ……
标签:MEMSmanufacturing
MEMS
本地下载

评论