FBAR 工艺滤波器白皮书

FBAR whitepaperA Brief Overview of FBAR Technology White Paper

By William Mueller Pathfinder Agilent Technologies Semiconductor Products Group Wireless Semiconductor Division

Introduction
FBAR is a breakthrough resonator technology being developed by Agilent Technologies. This technology can be used to create the essential frequency shaping elements found in modern Wireless systems, including filters, duplexers, and resonators for oscillators. FBAR stands for Film Bulk Acoustic Resonator. Examining the components of this name help explain the nature of FBAR technology.

compared to the interdigitated structures used in SAWs, especially at higher frequencies where the pitch of the interdigitated structures must be reduced.

Aluminum Nitrogen

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Film:

FBAR resonators are created using a thin film semi