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KXTF9-1026 Specifications Rev 1PART NUMBER:

± 2g Tri-axis Digital Accelerometer Specifications

KXTF9-1026 Rev. 1 Dec-2009

Product Description
The KXTF9 is a tri-axis +/-2g, +/-4g or +/-8g silicon micromachined accelerometer with integrated orientation, tap/double tap, and activity detecting algorithms. The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC devic