资料介绍
KXTE9-4100 Specifications Rev 3PART NUMBER:
± 2g Tri-axis Digital Accelerometer Specifications
KXTE9-4100 Rev. 3 Nov-2009
Product Description The KXTE9-4100 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-2g (19.6 m/s/s). The KXTE9 contains integrated orientation and activity detecting algorithms. The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using
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